Pantheon SEMPARIS Le serveur des séminaires parisiens Paris

Statut Confirmé
Domaines hep-ph
Date Mercredi 22 Mars 2017
Heure 16:30
Institut LPT
Salle room 114, 1st floor, bldg 210
Nom de l'orateur Arbeltier
Prenom de l'orateur Steven
Addresse email de l'orateur
Institution de l'orateur Laboratoire de Physique des Gaz et des Plasmas, Univ. Paris 11
Titre Modeling of Radio Frequency Plasma Magnetron in N_2 with lithium oxide target
Résumé This study is focused on deposition of one of thin film battery component the electrolyte It is deposited by magnetron sputtering of a target in pure nitrogen plasma. A magnetron contains a low pressure plasma and a strong magnetic field to increase the ionization degree. The ions are attracted toward a target to sputter it and project particles onto a substrate in front of the target, in order to make a thin film deposition. In spite of the successful implementation of this technology, the understanding of the elementary processes governing the complex kinetics in such type of plasma is still sparse. Moreover, the magnetic field has a tremendous influence on the position of incident ions on the target and is different on each reactor. An interesting approach to learn more the phenomena occurring is modeling.The present results are obtained from two models : a 0D model resolving by a self-consistent method the Boltzmann inhomogeneous equation for magnetized electrons in magnetron plasma and balance equations describing the reactional kinetics of gaseous species, and a 2D model using Particle-In-Cell-Monte-Carlo approach.
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