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Status |
Confirmed |
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Seminar Series |
SEM-INFOR |
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Subjects |
hep-ph |
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Date |
Wednesday 22 March 2017 |
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Time |
16:30 |
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Institute |
LPT |
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Seminar Room |
room 114, 1st floor, bldg 210 |
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Speaker's Last Name |
Arbeltier |
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Speaker's First Name |
Steven |
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Speaker's Email Address |
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Speaker's Institution |
Laboratoire de Physique des Gaz et des Plasmas, Univ. Paris 11 |
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Title |
Modeling of Radio Frequency Plasma Magnetron in N_2 with lithium oxide target |
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Abstract |
This study is focused on deposition of one of thin film battery component the electrolyte
It is deposited by magnetron sputtering of a target in pure nitrogen plasma. A magnetron
contains a low pressure plasma and a strong magnetic field to increase the ionization degree.
The ions are attracted toward a target to sputter it and project particles onto a substrate in front
of the target, in order to make a thin film deposition.
In spite of the successful implementation of this technology, the understanding of the
elementary processes governing the complex kinetics in such type of plasma is still sparse.
Moreover, the magnetic field has a tremendous influence on the position of incident ions on the
target and is different on each reactor. An interesting approach to learn more the phenomena
occurring is modeling.The present results are obtained from two models : a 0D model resolving
by a self-consistent method the Boltzmann inhomogeneous equation for magnetized electrons
in magnetron plasma and balance equations describing the reactional kinetics of gaseous
species, and a 2D model using Particle-In-Cell-Monte-Carlo approach. |
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arXiv Preprint Number |
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Comments |
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